Wafer Boat

Wafers

Wafer Boat

Wafer boat supporting silicon wafers.
The wafer boat includes a ceramic body having at least one wafer support structure sized to support a silicon wafer thereon.

A ceramic coating is disposed on a surface of the wafer slot. The ceramic coating has an impurity migration preventing thickness and a wafer contact surface.
The wafer contact surface has a post coating surface finish, which substantially prevents slip in the silicon wafers.